Automatizacion de un sistema de produccion de peliculas delgadas por el metodo de Sputtering

Bibliographic Details
Main Author: Ibuki Kasubuchi, Hector Tosiaki
Other Authors: Rodriguez Ramirez, Francisco Javier (Asesor), Cruz Manjarrez, Héctor (Asesor)
Format: Tesis de licenciatura
Published: MX 1997
Subjects:
Online Access:https://hdl.handle.net/20.500.14330/TES01000253878
http://132.248.9.195/ppt2002/0253878/Index.html
Description
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