Estudio de peliculas delgadas de nitruros de silicio fluorados depositadas por IC-RPECVD
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| Format: | Tesis de doctorado |
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MX
2005
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| Online Access: | https://hdl.handle.net/20.500.14330/TES01000341989 http://132.248.9.195/ptb2005/00388/0341989/Index.html |